Canon has commenced sales of the new FPA-6300ES6a Deep Ultra-Violet (DUV) scanner, a lithography tool employing a KrF excimer laser light source for the high-volume production of memory, logic and image-processing devices. Amid an increasing demand for computers, smartphones and other advanced electronic devices, demand for the semiconductors used in the production of these products has continually increased, creating the need for tools capable of delivering high productivity, precision, reliability and capacity utilization. In response to these industry needs, Canon launched the new FPA-6300ES6a, designed for the mass production of Dynamic Random Access Memory (DRAM), flash and other memory devices; logic devices such as microprocessors for personal computers; color filters and other imaging sensors and image-processing devices.
Based on technologies cultivated through the field-proven FPA-6000 series, Canon’s new FPA-6300ES6a DUV scanner achieves high throughput and high-overlay accuracy to effectively respond to the advanced needs of chip manufacturers seeking reduced cost of ownership. The FPA-6300ES6a DUV scanner employs highly sophisticated stage-control technologies, an improved alignment scope and precise temperature control to make possible an overlay accuracy of 5nm. Additionally, it offers an advanced NA 0.86 projection optical system and a wide range of options to support demanding and robust device production.
