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Epson develops extremely small, high-performance quartz crystal atmospheric pressure sensor


Epson Toyocom has developed an extremely small, high-performance quartz crystal atmospheric pressure sensor that employs an original pressure-sensing structure using QMEMS technology. The new sensor has a cubic volume of only 12.5 cc and weighs just 15 grams yet is accurate to within 10 Pa or about 1/10,000 of one bar and boasts a resolution of 0.1 Pa. The performance and features of the new pressure sensor will greatly aid device designers in their efforts to reduce the size and improve the performance of devices for a variety of meteorological and security applications.


The new Epson Toyocom high-performance quartz crystal atmospheric pressure sensor also has potential applications in everyday electronic devices to provide accurate measurements of barometric pressure.
Commercial development is scheduled for completion sometime in fiscal 2009.




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