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Omron D6F MEMS mass flow sensor incorporates world’s smallest class of MEMS element


Omron will release a new MEMS flow sensor designed to optimize efficiency in fuel cell systems from April 2008. The Omron D6F MEMS mass flow sensor (quick-connect type) is the latest addition to Omron’s D6F series of flow sensors. Flow sensors are an essential component in fuel cell systems. They enable precise measurement and control of the fuel gas and air flow to maintain the optimal balance of hydrogen and oxygen that is critical to efficient electrical conversion. Omron’s new mass flow sensor uses highly sensitive micromachined MEMS elements to measure minute gas flows with precision. Designed specifically for incorporation into fuel cell systems, the new sensor reduces the time necessary for calibration and cuts total system costs as a result.


Measuring 1.55mm (H) x 1.55mm (W) x 0.4mm (D), Omron’s new sensor incorporates the world’s smallest class of MEMS element to enable precise measurement of even very low flow rates. Omron D6F MEMS mass flow sensor will be on display at the 4th International Hydrogen & Fuel Cell Expo, which runs from February 27 – 29 at Tokyo Big Site.




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