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Canon Launches New FPA-6300ES6a KrF DUV Scanner for mass Production of Memory, Logic And Image-Processing Devices
Canon has commenced sales of the new FPA-6300ES6a Deep Ultra-Violet (DUV) scanner, a lithography tool employing a KrF excimer laser light source for the high-volume production of memory, logic and image-processing devices. Amid an increasing demand for computers, smartphones and other advanced electronic devices, demand for the semiconductors used in the production of these products…